Micro and Nanotechnology Laboratory

Micro and Nanotechnology Laboratory. It is a premier interdisciplinary research facility at the University of Illinois Urbana-Champaign, dedicated to advancing the frontiers of microelectromechanical systems and nanotechnology. The laboratory serves as a central hub for collaborative research across multiple engineering and science disciplines, providing state-of-the-art cleanroom and fabrication resources. Its work is integral to the university's mission in innovation and technology transfer, contributing significantly to fields like photonics, bioengineering, and quantum information science.

History

The facility was formally established in 1999, building upon a strong foundation of semiconductor and materials science research at the University of Illinois Urbana-Champaign. Its creation was driven by the vision of faculty leaders like Ilesanmi Adesida and supported by significant investments from the State of Illinois and federal agencies such as the National Science Foundation. The laboratory was designed to consolidate and modernize the university's capabilities in microfabrication, responding to the growing interdisciplinary demand in the late 1990s. Early research directions were heavily influenced by pioneering work in compound semiconductors and optoelectronics conducted by researchers like Nick Holonyak and Milton Feng.

Research and facilities

Core research thrusts encompass nanophotonics, bioMEMS, nanoelectronics, and quantum materials, with strong ties to the Beckman Institute for Advanced Science and Technology and the Carl R. Woese Institute for Genomic Biology. The central facility features a 10,000-square-foot Class 100 cleanroom equipped for advanced lithography, thin-film deposition, and etching processes. Specialized laboratories support work in microfluidics, atomic force microscopy, and molecular beam epitaxy. Major research initiatives are often funded by the Defense Advanced Research Projects Agency, the Department of Energy, and the National Institutes of Health, focusing on applications in healthcare diagnostics, renewable energy, and secure communications.

Educational programs

The laboratory is a critical training ground for graduate students and postdoctoral researchers from across the Grainger College of Engineering and the College of Liberal Arts & Sciences. It supports the laboratory course and provides hands-on training for students in programs like Electrical and Computer Engineering, Materials Science and Engineering, and Bioengineering. Educational outreach includes the Research Experience for Undergraduates program sponsored by the National Science Foundation and collaborations with the Illinois Mathematics and Science Academy. These programs are designed to cultivate the next generation of leaders in nanoscience and engineering.

Notable achievements

Researchers have made seminal contributions, including the development of the world's fastest transistor by Milton Feng and Walid Hafez, and pioneering work on blue laser diodes. Breakthroughs in lab-on-a-chip technology for biomedical applications have been led by scientists like Rashid Bashir and Brian Cunningham. The laboratory has also been at the forefront of creating metamaterials for controlling light and sound, with significant work by John Rogers and Xiuling Li. These innovations have led to numerous patents, the founding of startup companies, and recognition through awards like the IEEE Medal of Honor and the National Medal of Technology and Innovation.

Organizational structure

The laboratory operates as an interdisciplinary research unit under the Office of the Vice Chancellor for Research and Innovation at the University of Illinois Urbana-Champaign. It is governed by a director, currently Brian Cunningham, and an executive committee comprising faculty from key partner departments. Day-to-day operations are managed by a team of professional staff overseeing the cleanroom, safety protocols, and user training. Strategic direction is informed by an external advisory board with members from industry leaders like Intel, Texas Instruments, and Abbott Laboratories, as well as national laboratories such as Argonne National Laboratory and Sandia National Laboratories.

Category:University of Illinois Urbana-Champaign Category:Research institutes in Illinois Category:Microtechnology Category:Nanotechnology