Holonyak Micro & Nanotechnology Lab

Holonyak Micro & Nanotechnology Lab. It is a premier interdisciplinary research facility at the University of Illinois Urbana-Champaign, dedicated to advancing the frontiers of microtechnology and nanotechnology. Named for Nick Holonyak, the inventor of the first practical visible-spectrum LED, the lab serves as a hub for innovation in semiconductor devices, photonics, and bioelectronics. It consolidates world-class cleanroom facilities and expertise to support groundbreaking academic and industrial research.

History and establishment

The lab was formally established in 2003 through a merger of the Microelectronics Laboratory and the Laboratory for Microphysics, consolidating decades of institutional expertise in solid-state physics and electrical engineering. Its creation was championed by visionary faculty and administrators, including Ilesanmi Adesida, to provide a centralized, state-of-the-art resource for the College of Engineering. The naming honors the legacy of Nick Holonyak, a distinguished University of Illinois professor and National Medal of Technology recipient whose work under John Bardeen revolutionized optoelectronics. This consolidation positioned the facility to compete with leading national centers like the MIT Microsystems Technology Laboratories and Stanford Nanofabrication Facility.

Research focus and facilities

Core research thrusts encompass advanced semiconductor device fabrication, nanophotonics, quantum information science, MEMS, and flexible electronics. The lab operates a massive, class-100/1000 cleanroom complex that supports processes including electron-beam lithography, molecular beam epitaxy, and atomic layer deposition. This infrastructure enables work on materials ranging from traditional silicon and III-V semiconductors to emerging 2D materials like graphene and transition metal dichalcogenides. Collaborative projects frequently involve the Beckman Institute for Advanced Science and Technology, the Materials Research Laboratory, and industry partners such as Intel and Texas Instruments. The facility is also integral to the NSF-funded Center for Advanced Electronics through Machine Learning.

Major achievements and innovations

Researchers have produced seminal advances, including pioneering contributions to blue laser diodes, high-efficiency light-emitting transistors, and the world's fastest transistors. Work led by Milton Feng on pseudomorphic high-electron-mobility transistors set repeated speed records. The lab has been central to developing biocompatible electronics for medical applications, a field advanced by John A. Rogers. Innovations in quantum dot technology and plasmonic devices have also emerged from its cleanrooms. These contributions are recognized through prestigious awards like the IEEE Medal of Honor, Draper Prize, and numerous National Academy of Engineering inductions for affiliated faculty.

Educational role and programs

The lab is a critical training ground for graduate and undergraduate students across engineering and physical sciences, offering hands-on instruction in advanced fabrication and characterization techniques. It supports the UIUC curriculum for departments like Electrical and Computer Engineering, Materials Science and Engineering, and Physics. Key educational initiatives include the NSF Graduate Research Fellowship Program, the SURGE program for undergraduates, and specialized training workshops. Students regularly present work at major conferences like the International Electron Devices Meeting and publish in high-impact journals such as Nature Nanotechnology and Science.

Organizational structure and leadership

The lab operates under the Grainger College of Engineering and reports to the Vice Chancellor for Research and Innovation. It is directed by a faculty director, a role held by figures such as Ilesanmi Adesida and currently John A. Rogers. Governance involves a faculty executive committee representing key user departments and research centers. The facility is staffed by professional engineers and technicians who manage tool operations, safety protocols, and user training. Strategic partnerships are maintained with federal agencies including the Department of Energy, DARPA, and the National Institute of Standards and Technology, as well as with corporate members of its industrial consortium.

Category:University of Illinois Urbana-Champaign Category:Research institutes in Illinois Category:Microtechnology Category:Nanotechnology